High-resolution X-ray microprobe using a spatial filter and its application tomicro-XAFS measurements

Abstract

An x-ray microprobe system with total-reflection mirror optics for trace element analysis has been developed at beamline 37XU of SPring-8. To achieve sub-microprobe, a spatial filter has been installed downstream of a monochromator. Focusing tests have been performed in the x-ray energy range of 6-14 keV. A focused beam size of 0.83μm(V)×1.35μm(H) has been obtained at an x-ray energy of 10 keV, and using a spatial filter in the horizontal direction, the beam size is down to 0.84 μm. Micro-x-ray absorption fine structure (XAFS) spectroscopy of submicrometer particles has been done by utilizing the total-reflection mirror optics. It was clearly observed from the nickel K-edge XAFS spectra that the oxidation state of nickel was a mixture of metal and oxide even in the single submicrometer particle. © 2011 American Institute of Physics.