Abstract
The concept and design of a low cost two-axes MEMS scanning mirror with an aperture size of 7 millimetres for a compact automotive LIDAR sensor is presented. Hermetic vacuum encapsulation and stacked vertical comb drives are the key features to enable a large tilt angle of 15 degrees. A tripod MEMS mirror design provides an advantageous ratio of mirror aperture and chip size and allows circular laser scanning. © Springer-Verlag Berlin Heidelberg 2011.
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CITATION STYLE
Hofmann, U., & Janes, J. (2011). MEMS mirror for low cost laser scanners. In Advanced Microsystems for Automotive Applications 2011: Smart Systems for Electric, Safe and Networked Mobility (pp. 159–165). Kluwer Academic Publishers. https://doi.org/10.1007/978-3-642-21381-6_16
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