Abstract
Creating nanometer scale structures using a FIB has been a topic of recent interest. In this chapter we report on complicated nanometer level structures, such as a nano-wine glass and a nano-toilet, based on CAD data produced by the FIB CVD process. © 2005 Springer Science+Business Media, Inc.
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APA
Kaito, T. (2005). Three-dimensional nanofabrication using focused ion beams. In Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice (pp. 73–86). Springer US. https://doi.org/10.1007/0-387-23313-X_4
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