Optical MEMS

Abstract

Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many fields. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-performance systems in optical communication networks and data storage devices. This paper discusses the impacts of MEMS technologies on optical systems. Furthermore, state-of-the-art examples of micro optical switches, pigtailed tunable filters and two-dimensional MEMS optical scanners are described.