{001}-textured Pb(Zr, Ti)O3thin films on stainless steel by pulsed laser deposition

Abstract

In this work, we report nearly single oriented {001}-textured ferroelectric PbZr 0.52 Ti 0.48 O 3 thin films grown by pulsed laser deposition onto AISI 304 stainless steel substrates. Pt, Al 2 O 3, and LaNiO 3 buffer layers promote the PbZr 0.52 Ti 0.48 O 3 {001} texture and protect the substrate against oxidation during deposition. The dominant {001} texture of the PbZr 0.52 Ti 0.48 O 3 layer was confirmed using X-ray and electron backscatter diffraction. Before poling, the films exhibit a permittivity of about 350 at 1 kHz and a dielectric loss below 5%. The films display a remanent polarization of about 16.5 μ C cm-2 and a high coercive field of up to E c = 135.9 kV cm-1. The properties of these PbZr 0.52 Ti 0.48 O 3 thin films on stainless steel are promising for various MEMS applications such as transducers or energy harvesters.