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Mems Application of Piezoelectric Materials

  • Hauden D
Springer Netherlands, (2000), 335-346
DOI: 10.1007/978-94-011-4094-2_33
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Hauden, D. (2000). Mems Application of Piezoelectric Materials. In Piezoelectric Materials: Advances in Science, Technology and Applications (pp. 335–346). Springer Netherlands. https://doi.org/10.1007/978-94-011-4094-2_33

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