Trinity Detection System for SEM and FIB/SEM.

Abstract

Detection of signal electrons belongs to key determinants of the image quality of a scanning electron microscope (SEM). Historically, signal electrons were detected in the specimen chamber. Nowadays, majority of modern field emission SEMs use an in-lens detection where one or multiple detectors located inside or above the final lens are employed to collect secondary (SE) and backscattered electrons (BSE). Electric or magnetic fields are used to create a final lens closely above or at the surface of a sample which attracts SE and BSE towards detectors above the pole piece.