Zirconia ceramics applied in a pressure-sensitive device fabricated using HTCC technology

Abstract

A wireless passive high-temperature cofired ceramic (HTCC) pressure sensor fabricated from partially stabilized zirconia (PSZ) ceramic is proposed. This sensor can be used in high-temperature environments (in excess of 1000 °C in some cases) owing to its high mechanical strength at high thermal stress, and pressure data can be transmitted through mutual inductance coupling. Experimental systems are designed to obtain the necessary frequency-pressure and frequency-temperature characteristics. The experimental results between room temperature and 800 °C (and then at 800 °C for 30 min) indicate that the sensor has improved stability at 800 °C and the sensor also shows a high sensitivity at room temperature.