A 0.19e- rms Read Noise 16.7Mpixel Stacked Quanta Image Sensor with 1.1 μm-Pitch Backside Illuminated Pixels

Abstract

This letter reports a 16.7 Mpixel, 3D-stacked backside illuminated Quanta Image Sensor (QIS) with 1.1 $\mu \text{m}$ -pitch pixels which achieves 0.19 e- rms array read noise and 0.12 e- rms best single-pixel read noise under room temperature operation. The accurate photon-counting capability enables superior imaging performance under ultra-low-light conditions. The sensor supports programmable analog-to-digital convertor (ADC) resolution from 1-14 bits and video frame rates up to 40 fps with $4096\times4096$ resolution and 600 mW power consumption.