Abstract
Wafer-level fabrication of advanced enzyme-based BioMEMS usually requires bonding techniques at elevated temperatures such as anodic bonding. This conflicts with the low temperature stability of enzymes and can only be overcome by enzyme immobilization after bonding. This paper presents a novel in-device enzyme immobilization technique, which is compatible to MEMS technology and allows wafer-level fabrication. In-device patterning of enzyme has been demonstrated for a continuous glucose monitor.
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CITATION STYLE
Zimmermann, S., Fienbork, D., Wasilik, M., Flounders, B., & Liepmann, D. (2002). A Novel In-Device Enzyme Immobilization Method for Biomems, Demonstrated for a Continuous Glucose Monitor. In Micro Total Analysis Systems 2002 (pp. 449–451). Springer Netherlands. https://doi.org/10.1007/978-94-010-0295-0_150
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