Controlled sputtering pressure on high-quality sb2 se3 thin film for substrate configurated solar cells

Abstract

Magnetron sputtering has become an effective method in Sb2 Se3 thin film photovoltaic. Research found that post-selenization treatments are essential to produce stoichiometric thin films with desired crystallinity and orientation for the sputtered Sb2 Se3 . However, the influence of the sputtering process on Sb2 Se3 device performance has rarely been explored. In this work, the working pressure effect was thoroughly studied for the sputtered Sb2 Se3 thin film solar cells. High-quality Sb2 Se3 thin film was obtained when a bilayer structure was applied by sputtering the film at a high (1.5 Pa) and a low working pressure (1.0 Pa) subsequently. Such bilayer structure was found to be beneficial for both crystallization and preferred orientation of the Sb2 Se3 thin film. Lastly, an interesting power conversion efficiency (PCE) of 5.5% was obtained for the champion device.