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Electrode design for multimode suppression of aluminum nitride tuning fork resonators

Nanotechnology and Precision Engineering (2023) 6(4)
DOI: 10.1063/10.0019629
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Abstract

HIGHLIGHTS • A new strategy is explored for suppressing the multimode effect by tuning the electrode pattern of piezoelectric tuning fork resonators. • Comprehensive resonator performance improvement is achieved by effective multimode suppression. • Crucial parameters are improved simultaneously with Q = 7753, kteff2 = 0.066%, Rm = 23.6 kΩ, and an 86% higher Rp/Rs

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APA

Yuan, Y., Yang, Q., Li, H., Shi, S., Niu, P., Sun, C., … Pang, W. (2023). Electrode design for multimode suppression of aluminum nitride tuning fork resonators. Nanotechnology and Precision Engineering, 6(4). https://doi.org/10.1063/10.0019629

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