Abstract
Ellipsometry is an optical method for determining the properties of thin films, using manipulation and measurement of the polarization state of reflected light. This chapter introduces the method, summarizes the optical principles and analysis involved, and describes the basic experimental arrangements. Applications and limitations of the technique are presented. A specific application, the use of ellipsometry to determine the pore size distribution in thin porous films, is then described in some detail.
Cite
CITATION STYLE
Yeatman, E. (2016). Ellipsometry of Sol–Gel Films. In Handbook of Sol-Gel Science and Technology (pp. 1–11). Springer International Publishing. https://doi.org/10.1007/978-3-319-19454-7_47-1
Register to see more suggestions
Mendeley helps you to discover research relevant for your work.
