Self-forming TiBN Nanocomposite Multilayer Coating Prepared by Pulse Cathode Arc Method

Abstract

Novel multilayer structured TiBN coatings were deposited on Si (100) substrate using TiBN complex cathode plasma immersion ion implantation and deposition technique (PIIID). The coatings were characterized by X-ray diffraction (XRD), high-resolution transmission electron microcopy (HRTEM), energy-dispersive spectrometer (EDS) and ball-on-disk test. XRD results reveal that both samples of TiBN coatings have the main diffraction peak of TiN (200) and (220). Cross-section TEM images reveal that these coatings have the character of self-forming multilayer and consists of face-centered cubic TiN and hexagonal BN nanocrystalline embedded in amorphous matrix. Because of the existence of hexagonal BN, the friction coefficient of the new TiBN coating in room temperature is obviously lower than that of the monolithic TiN nanocrystalline coating.