Fundamental study for a graphite-based microelectromechanical system

9Citations
Citations of this article
12Readers
Mendeley users who have this article in their library.

Abstract

We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.

References Powered by Scopus

Studying disorder in graphite-based systems by Raman spectroscopy

4136Citations
N/AReaders
Get full text

Electromechanical resonators from graphene sheets

2733Citations
N/AReaders
Get full text

Performance of monolayer graphene nanomechanical resonators with electrical readout

912Citations
N/AReaders
Get full text

Cited by Powered by Scopus

Fabrication of high quality and large area graphite thin films by pyrolysis and graphitization of polyimides

38Citations
N/AReaders
Get full text

Advanced optical detection through the use of a deformably transferred nanofilm

12Citations
N/AReaders
Get full text

Interplanar stiffness in defect-free monocrystalline graphite

10Citations
N/AReaders
Get full text

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Cite

CITATION STYLE

APA

Sone, J., Murakami, M., & Tatami, A. (2018). Fundamental study for a graphite-based microelectromechanical system. Micromachines, 9(2). https://doi.org/10.3390/mi9020064

Readers' Seniority

Tooltip

PhD / Post grad / Masters / Doc 5

71%

Researcher 2

29%

Readers' Discipline

Tooltip

Engineering 2

40%

Chemical Engineering 1

20%

Materials Science 1

20%

Chemistry 1

20%

Save time finding and organizing research with Mendeley

Sign up for free