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Carbon Nanotube Via Technologies for Future LSI Interconnects

  • Nihei M
  • Kawabata A
  • Horibe M
  • et al.
DOI: 10.1007/1-84628-235-7_27
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Abstract

nanotubes (CNTs) [1] are attractive as nanosize structural elements from which devices can be constructed by bottom-up fabrication. A is a macromolecule of and is made by rolling a sheet of graphite into a cylindrical shape. nanotubes

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Nihei, M., Kawabata, A., Horibe, M., Kondo, D., Sato, S., & Awano, Y. (2005). Carbon Nanotube Via Technologies for Future LSI Interconnects (pp. 315–326). https://doi.org/10.1007/1-84628-235-7_27

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