Dislocation reduction of InAs nanofins prepared on Si substrate using metal-organic vapor-phase epitaxy

Abstract

InAs nanofins were prepared on a nanopatterned Si (001) substrate by metal-organic vaporphase epitaxy. The threading dislocations, stacked on the lowest-energy-facet plane {111}, move along the SiO2 walls, resulting in a dislocation reduction, as confirmed by transmission electron microscopy. The dislocations were trapped within a thin InAs epilayer. The obtained 90-nm-wide InAs nanofins with an almost etching-pit-free surface do not require complex intermediate-layer epitaxial growth processes and large thickness typically required for conventional epitaxial growth. © 2012 Hsu et al.