Synthesis of Calcium(II) Amidinate Precursors for Atomic Layer Deposition through a Redox Reaction between Calcium and Amidines

Abstract

We have prepared two new CaIIamidinates, which comprise a new class of ALD precursors. The syntheses proceed by a direct reaction between Ca metal and the amidine ligands in the presence of ammonia. Bis(N,N′-diisopropylformamidinato)calcium(II) (1) and bis(N,N′-diisopropylacetamidinato)calcium(II) (2) adopt dimeric structures in solution and in the solid state. X-ray crystallography revealed asymmetry in one of the bridging ligands to afford the structure [(η2-L)Ca(μ-η2:η2-L)(μ-η2:η1-L)Ca(η2-L)]. These amidinate complexes showed unprecedentedly high volatility as compared to the widely employed and commercially available CaIIprecursor, [Ca3(tmhd)6]. In CaS ALD with 1 and H2S, the ALD window was approximately two times wider and lower in temperature by about 150 °C than previously reported with [Ca3(tmhd)6] and H2S. Complexes 1 and 2, with their excellent volatility and thermal stability (up to at least 350 °C), are the first homoleptic CaIIamidinates suitable for use as ALD precursors.