MEMS calibration standards for the optical measurement of displacements

Abstract

The goal of this work is to develop miniaturized reference standards for the optical measurement of in-plane displacements serving for the calibration of optical systems used in the production and characterization of MEMS. The proposed devices consist of SOI-based in-plane microactuators. The displacements resulting from both mechanical and electrostatic actuations are measured using optical techniques such as stroboscopic illumination, laser-deflection and digital speckle interferometry © Springer-Verlag Berlin Heidelberg 2009.