Abstract
To get the reader familiarize with 3D TCAD simulation, we start with the simplest p-n junction diode imaginable. This diode has just one mask layer as shown in Fig. 5.1. Strictly speaking, this simulation example is just an extension of a 2D problem since there is no variation in the z direction; it could even be modeled in 1D. Nevertheless, this is a good place to start.
Cite
CITATION STYLE
APA
Li, S., & Fu, Y. (2012). P-N Junction Diode. In 3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics (pp. 105–133). Springer New York. https://doi.org/10.1007/978-1-4614-0481-1_5
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