We report on a novel optical microcavity sensing scheme by using the orthogonal demodulation Pound–Drever–Hall (PDH) technique. We found that larger sensitivity in a broad range of cavity quality factor (Q) could be obtained. Taking microbubble resonator (MBR) pressure sensing as an example, a lower detection limit than the conventional wavelength shift detection method was achieved. When the MBR cavity Q is about 105–106, the technique can decrease the detection limit by one or two orders of magnitude. The pressure-frequency sensitivity is 11.6 GHz/bar at wavelength of 850 nm, and its detection limit can approach 0.0515 mbar. This technique can also be applied to other kinds of microcavity sensors to improve sensing performance.
CITATION STYLE
Hu, J., Liu, S., Wu, X., Liu, L., & Xu, L. (2019). Orthogonal demodulation pound–drever–hall technique for ultra-low detection limit pressure sensing. Sensors (Switzerland), 19(14). https://doi.org/10.3390/s19143223
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