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Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams

  • Frost F
  • Takino H
  • Fechner R
  • et al.
Springer London, (2006), 239-242
DOI: 10.1007/1-84628-559-3_40
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Abstract

We investigated the smoothing effect of ion beam etching with the aid of a sacrificial layer on smoothly cut metal surfaces. Electroplating copper and electrolessplating nickelphosphor were used as specimens to compare their smoothness characteristics. The surfaces...

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APA

Frost, F., Takino, H., Fechner, R., Schindler, A., Ohi, N., & Nomura, K. (2006). Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams. In Towards Synthesis of Micro-/Nano-systems (pp. 239–242). Springer London. https://doi.org/10.1007/1-84628-559-3_40

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