A novel silicon based tactile sensor on elastic steel sheet for prosthetic hand

Abstract

This paper focuses on developing a novel tactile sensor to be used in a prosthetic hand. A novel structure of combining an elastic steel sheet and a piezoresistive gauge is designed and fabricated by the hybrid method of the traditional machining process and the MEMS technology. Normal force loading tests by applying force from 0 to 15N and 0 to 0.1N are performed respectively to obtain the preliminary characterization of the designed sensor. The results of the testing experiments show the good linearity, sensitivity and hysteresis of the sensor. The sensor is mounted on the fingertip of a commercial prosthetic hand and covered by polydimethylsiloxane (PDMS)，which can be tested for further application.