Nanocharacterization of Gold/ Gold Contact Surface Failure in Mems Contact Switches

Abstract

Switching components have been viewed as a great application opportunity for micro electro-mechanical systems (MEMS). For competitive products, reliability problems must be resolved. The study presented in this paper is a basic step toward the understanding of the failure of gold/ gold contact switches. This involves the interrelationship among surface conditions, hardness, adventitious insulating layers, fatigue cycling and the operational environment [1]. These elements provide the guidelines and assessment of contact wear, deformation, surface fatigue and adhesion characteristics of MEMS contact switches. In this study, gold micro contacts are investigated and characterized through atomic force microscopy, nanoindentation, nanoscratch, and nanofatigue tests using the state-of-the-art NanoTest characterization system.