Evaluation of Ti-Zr-V (NEG) thin films for their pumping speed and pumping capacity

Abstract

Deposition of NEG thin films onto the interior walls of the vacuum chambers is an advanced technique to convert a vacuum chamber from a gas source to an effective pump. These films offer considerably large pumping speed for reactive gases like CO, H2 etc. A UHV compatible pumping speed measurement system was developed in-house to measure the pumping speed of NEG coated chambers. To inject the fixed quantity of CO and H2 gas in pumping speed measurement set-up a calibrated leak was also developed. Stainless steel chambers were sputter coated with thin film of Ti-Zr-V getter material using varied parameters for different compositions and thickness. Pumping capacity which is a function of sorbed gas quantities was also studied at various activation temperatures. In order to optimize the activation temperature for maximum pumping speed for CO and H2, pumping speeds were measured at room temperature after activation at different temperatures. The experimental system detail, pumping performance of the NEG film at various activation temperatures and RGA analysis are presented.