CITATION STYLE
Roberts, T. A., Grace, J. M., McDonald, D. B., Gray, K. E., & Chang, R. P. H. (1993). In Situ Compositional Analysis of Multielement Thin Films. In Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices (pp. 395–399). Springer Netherlands. https://doi.org/10.1007/978-94-011-1727-2_23
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