Abstract
There has been a large demand for the realization of on-chip fluxgate magnetic sensors, with exciting and sensing control IC circuits. Based on UV lithography and other MEMS technology, a new three dimensional solenoid type micro magnetic sensor has been designed and fabricated to measure the components of magnetic induction vector in outer space. The fabricated micro sensor was integrated in IC circuits of MEMS satellite. © 2006 IOP Publishing Ltd.
Cite
CITATION STYLE
Wang, Y., Liu, G., Xiong, Y., Yang, J., & Tian, Y. (2006). Fabrication of the three-dimensional solenoid type micro magnetic sensor. Journal of Physics: Conference Series, 34(1), 880–884. https://doi.org/10.1088/1742-6596/34/1/146
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