Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures

De Groot, P., De Lega, X. C., & Liesener, J. (2009). Model-based white light interference microscopy for metrology of transparent film stacks and optically-unresolved structures. In Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (pp. 236–243). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-642-03051-2_40