Abstract
The design, construction, and performance of an automatic photometric ellipsometer with rotating analyzer for the VUV region (5-30 eV) is described. The use of a synchrotron radiation source and triple-reflection polarizers makes this new spectral region accessible to spectroscopic ellipsometry. New dielectric function data are presented for InP(110), YBa2Cu 3O7, and epitaxial CaF2/Si(111).
Cite
CITATION STYLE
APA
Johnson, R. L., Barth, J., Cardona, M., Fuchs, D., & Bradshaw, A. M. (1989). Spectroscopic ellipsometry with synchrotron radiation. Review of Scientific Instruments, 60(7), 2209–2212. https://doi.org/10.1063/1.1140823
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