Various microcomponents, including microelectrodes and micro-optic and microfluidic components, can be fabricated in transparent materials by femtosecond laser direct writing. This chapter describes in detail techniques for integrating different types of microcomponents on a single substrate for constructing highly functional microfluidic, photonic, and optofluidic systems and devices. Several examples are described, including integration of microlenses and waveguides for beam collimation and focusing, integration of a micro-optical ring cavity and a microfluidic chamber for creating 3D microfluidic dye lasers, integration of microelectrodes and waveguide-based Mach–Zehnder interferometer in a lithium niobate (LiNbO3) crystal for constructing an optical modulator, and integration of micro-optic and microfluidic components in glass for optofluidic applications.
CITATION STYLE
Sugioka, K., & Cheng, Y. (2014). Integration of microcomponents. SpringerBriefs in Applied Sciences and Technology, (9781447155409), 89–103. https://doi.org/10.1007/978-1-4471-5541-6_8
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