Special Techniques in SEM

Abstract

Magnetic stray fields in front of the specimen can be detected by the deflection of secondary electrons by the Lorentz force (magnetic contrast type—1) or by the deflection of primary electrons incident parallel to the surface. The Lorentz force due the internal magnetization affect the trajectories of backscattered electrons, resulting in type—2 magnetic contrast. The surface magnetization can be analysed by detecting the spin-polarization of SE.