A design of double resonant control combined with a model-free decoupling filter (MFDF) is presented in this paper. The design is demonstrated using the proposed MFDF to decouple a parallel multi-input multi-output (MIMO) system into several single-input single-output systems and applying a double resonant controller for vibration damping and cross coupling reduction in nanopositioners. Raster scan results of simulations based on an identified MIMO transfer function of a nanopositioning stage over an area of 4 μm × 0.4 μm with small RMS errors are demonstrated. Comparisons with using the double resonant controller alone show the effectiveness of the proposed controller.
CITATION STYLE
Ling, J., Feng, Z., Ming, M., & Xiao, X. (2016). Combined model-free decoupling control and double resonant control in parallel nanopositioning stages for fast and precise raster scanning. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 9834 LNCS, pp. 51–62). Springer Verlag. https://doi.org/10.1007/978-3-319-43506-0_5
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