Experimental modules introducing microfabrication utilizing a multidisciplinary approach

Abstract

A comprehensive, multidisciplinary approach to introducing the concepts of microfabrication to the undergraduate student body is being developed. The approach relies on multidisciplinary expertise in electrical engineering, mechanical engineering, chemistry, and physics and utilizes a pipeline approach to introduce concepts in microfabrication at the freshman, sophomore, and junior levels followed by a comprehensive capstone course in microfabrication at the senior level. In this paper, we describe the specific microfabrication modules being developed and their method of implementation. © 2011 American Society for Engineering Education.