Adaptive abstraction-level conversion framework for accelerated discrete-event simulation in smart semiconductor manufacturing

Abstract

Speeding up the simulation of discrete-event wafer-fabrication models is essential for fast decision-making to handle unexpected events in smart semiconductor manufacturing because decisionparameter optimization requires repeated simulation execution based on the current manufacturing situation. In this paper, we present a runtime abstraction-level conversion approach for discrete-event fab models to gain simulation speedup. During the simulation, if the fab's machine group model reaches a steady state, then the proposed method attempts to substitute this group model with a mean-delay model (MDM) as a high abstraction level model. TheMDMabstracts detailed event-driven operations of subcomponents in the group into an average delay based on the queuing modeling, which can guarantee acceptable accuracy in predicting the performance of steady-state queuing systems. To detect the steadiness, the proposed abstraction-level converter (ALC) observes the queuing parameters of low-level groups to identify the statistical convergence of each group's work-in-progress (WIP) level. When a group's WIP level is converged, the output-to-input couplings between the models are revised to change a wafer-lot process flow from the low-level group to a MDM. When the ALC detects lot-arrival changes or any wafer processing status change (e.g., a machinedown), the high-level model is switched back to its corresponding low-level group model. During high-to-low level conversion, the ALC generates dummywafer-lot events to re-initialize the machine states. The proposed method was applied to various case studies of wafer-fab systems and achieved simulation speedups up to about 4 times with 0.6 to 8.3% accuracy degradations.