Atom-probe tomography

Abstract

This chapter provides an overview of the current state of atom-probe tomography (APT). The history of APT is recounted so that the reader may put the many modern developments in context. It is noted that atom-probe tomography has the highest spatial resolution among analytical techniques (0.2nm), and it has the highest absolute analytical sensitivity (single atoms), a unique combination. The fundamentals of APT, including the operative physics, performance metrics, and hardware configurations, are discussed. Before examining the many benefits that may be realized in APT, however, its limitations such as image distortions and specimen failures are discussed in full. Specimen preparation procedures for most materials are explained. A comprehensive overview of the many materials applications including metals, ceramics, semiconductors, and organics is provided. Finally, there is a look toward the future to see where the technique is headed.