Scanning transmission electron microscopy (STEM) has enjoyed a recent surge in activity for two reasons. A long awaited improvement in the STEM performance of conventional TEM/STEM instruments coincided with the advent of aberration correction. This improvement was not for any fundamental reason — from the principle of reciprocity, the STEM resolution should be at least as good as the TEM resolution for the same objective lens. Lattice resolution high angle annular dark field (HAADF) STEM images are now a much more routine part of the analytical arsenal applied to materials characterisation.
CITATION STYLE
Krivanek, O., Dellby, N., Murfitt, M., Own, C., & Szilagyi, Z. (2009). STEM Aberration Correction: an Integrated Approach. In EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany (pp. 11–12). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-85156-1_6
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