Modeling and experimental characterization of resilient supports for turbomolecular pumps

Abstract

This paper illustrates a method of modeling and experimental characterization of resilient supports for turbomolecular pumps at component level. A dedicated test bench has been designed and realized. The modeling approach (Kelvin’s and Wiechert’s model) along with the characterization procedure aimed to evaluate the stiffness and damping introduced by the support at varying of pump spin speed are illustrated.