A review on morphological, structural and electrical characterization techniques of thin films

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Abstract

This review paper explains about the basics and the working of all the equipments involved in the morphological, structural and electrical analysis of deposited thin films the author has used at Indian Institute of Science. Working of XRD, XPS, SEM/TEM and AFM and other electrical characterization techniques have been explained with necessary schematic diagram and the photographs of the equipments.

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APA

Velmathi, G. (2016). A review on morphological, structural and electrical characterization techniques of thin films. International Journal of Engineering and Technology, 8(5), 1925–1935. https://doi.org/10.21817/ijet/2016/v8i5/160805410

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