Skip to main content
Book Chapter

MEMS/NEMS Devices and Applications

  • Young D
  • Zorman C
  • Mehregany M
Springer Berlin Heidelberg, (2010), 359-387
DOI: 10.1007/978-3-642-02525-9_12
N/ACitations
Citations of this article
11Readers
Mendeley users who have this article in their library.
Get full text

Abstract

Microelectromechanical microelectromechanical system (MEMS) systems (MEMS) have played key roles in many important areas, for example transportation, communication, automated manufacturing, environmental monitoring, health care,...

Cite

CITATION STYLE

APA

Young, D. J., Zorman, C. A., & Mehregany, M. (2010). MEMS/NEMS Devices and Applications. In Springer Handbook of Nanotechnology (pp. 359–387). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-642-02525-9_12

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free