Abstract
A novel gimbal-less, thermally actuated micromirror is developed which can be used as both a reference and scanning mirror in optical coherence tomography (OCT) applications. Maximum deflection angle of up to 28° has been achieved at 12mW in scanning mode. A vertical displacement of 116µm at 12mW (78±4°C) was observed in piston mode. Our design goal for this mirror is to undergo 5° angle. This deflection was accomplished at a temperature increase of 17±5°C with respect to ambient. Our device can be integrated with GaAs optics due to this moderate temperature increase during its operation.
Cite
CITATION STYLE
Izhar, U., Ooi, B. S., & Tatic-Lucic, S. (2010). A biaxial micromirror for angular and depth scanning in optical coherence tomography (OCT). In Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 230–233). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2010.61
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