The origin of defects induced in ultra-pure germanium by electron beam deposition

Abstract

The creation of point defects in the crystal lattices of various semiconductors by subthreshold events has been reported on by a number of groups. These observations have been made in great detail using sensitive electrical techniques but there is still much that needs to be clarified. Experiments using Ge and Si were performed that demonstrate that energetic particles, the products of collisions in the electron beam, were responsible for the majority of electron-beam deposition (EBD) induced defects in a two-step energy transfer process. Lowering the number of collisions of these energetic particleswith the semiconductor duringmetal depositionwas accomplished using a combination of static shields and superior vacuum resulting in devices with defect concentrations lower than 10 11 cm −3, the measurement limit of our deep level transient spectroscopy (DLTS) system. High energy electrons and photons that samples are typically exposed to were not influenced by the shields as most of these particles originate at the metal target thus eliminating these particles as possible damage causing agents. It remains unclear how packets of energy that can sometimes be as small of 2eV travel up to a μm into the material while still retaining enough energy, that is, in the order of 1 eV, to cause changes in the crystal. Themanipulation of this defect causing phenomenon may hold the key to developing defect free material for future applications.