Abstract
We introduce the ultra-precision micro structuring of high aspect ratio and array by means of mechanical machining with ultra-precision machine tool and single-crystal diamond tool.
Cite
CITATION STYLE
APA
Sawada, K., Kawai, T., & Takeuchi, Y. (2002). Micro Structuring of High Aspect Ratio and Array by Means of Mechanical Machining. In Initiatives of Precision Engineering at the Beginning of a Millennium (pp. 52–56). Springer US. https://doi.org/10.1007/0-306-47000-4_9
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