Miniaturizing the mechanical relay for signal and power control

Abstract

Traditionally, most Micro ElectroMechanical Systems (MEMS) have been made using silicon as the mechanical material; we have developed a metal based MEMS device technology that miniaturizes the basic DC, AC and RF relay. Advances in MEMS switches have primarily focused on RF switches [1], with power levels typically in the 10s to 100W [2] and contact related failure mechanisms [3,4]. We have developed an electrostatically actuated MEMS relays, has been developed (Fig. 1) and is capable of switching in ~3usec, sustaining more than 400V across its open contacts and controlling loads of 100s of watts to a few kilowatts.