Multiple-probe scanning probe microscopes for nanoarchitectonic materials science

Abstract

Nanoarchitectonic systems are of interest for utilizing a vast range of nanoscale materials for future applications requiring a huge number of elemental nanocomponents. To explore the science and technology of nanoarchitectonics, advanced characterization tools that can deal with both nanoscale objects and macroscopically extended nanosystems are demanded. Multiple-probe scanning probe microscopes (MP-SPMs) are powerful tools that meet this demand because they take the advantages of conventional scanning probe microscopes and realize atomically precise electrical measurements, which cannot be done with conventional microprobing systems widely used in characterizing materials and devices. Furthermore, an MP-SPM can be used to operate some nanoarchitectonic systems. In this review, we overview the indispensable features of MP-SPMs together with the past, present and future of MP-SPM technology.