Portable measurement system for static and dynamic characterization of MEMS component

Abstract

MEMS performance can be determined from the static and dynamic characteristic. These two parameters can be measured by various measuring systems. In this chapter, a portable measurement system which is able to measure static and dynamic characteristic of MEMS in 2-D and 3-D aspects is presented. Nanoscale static microstructure profiles are measured by means of white-light interferometry with nanometer scale accuracy. Key for dynamic characteristic measurement is the employment of stroboscopic lighting which is synchronized with the excitation signal of the measured sample. The system is capable of measuring multimode resonant frequencies and also mode reconstruction for both in-plane and out-of-plane vibration. The main advantage of the system is its versatility and portability for testing different vibration modes with improved reliability and repeatability. Achievable repeatability of the resonant frequency measurement can reach 0.012 kHz for in-plane vibration, while the repeatability of the out-of-plane resonant frequency is 0.216 kHz for a controlled environment and 0.354 for an environment with disturbance from air conditioner. © 2013 Springer Science+Business Media New York.