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AlN Thin Film Processing and Basic Properties

  • Muralt P
DOI: 10.1007/978-3-319-28688-4_1
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Abstract

Piezoelectric thin films are of interest for micro-electromechanical systems (MEMS) since the earliest developments in MEMS technology. This is quite natural or logic because the piezoelectric effect is an electromechanical effect. Resonators and ultrasound wave...

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Muralt, P. (2017). AlN Thin Film Processing and Basic Properties (pp. 3–37). https://doi.org/10.1007/978-3-319-28688-4_1

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