Surface Profilometer

  • Tosa M
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Abstract

Surface profilometer can measure profile of surface roughness, surface texture, surface waviness, surface step height, deposited thin film thickness, and so on by means of contacting and scanning a sharp stylus with a very small measurement force less than mN.

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APA

Tosa, M. (2018). Surface Profilometer. In Compendium of Surface and Interface Analysis (pp. 679–682). Springer Singapore. https://doi.org/10.1007/978-981-10-6156-1_110

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