Organic–inorganic hybrid gate dielectric for solution-processed ZnO thin film transistors

  • Oh J
  • Lim S
  • Yeon Kim J
  • et al.
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Abstract

The preparation of a hybrid dielectric film was carried out by blending sol–gel-derived sodium beta alumina (SBA) and poly(4-vinylphenol) (PVP) to enhance the capacitance of a gate dielectric film. PVP-SBA was cured at a temperature sufficiently low enough to apply to a plastic substrate, while maintaining good electrical properties and uniformity. Addition of sol–gel-derived SBA improved the film density, resulting in good PVP-SBA thermal stability. The prepared PVP-SBA was used for high-performance aqueous solution-based ZnO transistors at 200 °C.

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Oh, J.-Y., Lim, S.-C., Yeon Kim, J., Am Kim, C., Cho, K.-I., Deok Ahn, S., … Yoon, S.-M. (2013). Organic–inorganic hybrid gate dielectric for solution-processed ZnO thin film transistors. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 31(5). https://doi.org/10.1116/1.4817499

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