Microfabricated templates for the electrodeposition of metallic barcodes for use in multiplexed bioassays

Abstract

Lithographically defined polyimide templates were prepared using microfabrication techniques. The templates consist of high aspect ratio pores that were formed by deep plasma etching. Different metals are electrodeposited into the pores, and then the template is removed to allow the metallic rods (particles) to be released into solution. The striping pattern of metals on the particles is used to optically identify the particles. Particles range in size from 0.6 μm in diameter by 7.7 μm in length to 4.2 μm by 27 μm in length. These particles have been evaluated in a multiplexed DNA hybridization assay.