Laser-Scribing Technology for Wafer-Scale Graphene Devices

Abstract

Graphene has attracted a lot of attention due to its amazing properties. A huge number of novel devices, covering the electric, acoustic, photonic, magnetic and mechanical domains, can be developed with graphene. Its ultrahigh mobility can enable ultra-fast transistors or photodetectors. However, the natural zero bandgap of graphene, with insufficient on/off ratio, limits its practical applications. In this chapter, we introduce laser-scribing technology that enables wafer-scale production of graphene devices. Moreover, such laser-scribed graphene (LSG) is, infact, semi-reduced graphene oxide with a finite bandgap, which is suitable for practical applications. We show five kinds of representative LSG devices and their integration. These devices are a resistive memory, an earphone, a strain sensor, a pressure sensor and a light-emitting device. These LSG devices are high-performance, flexible and low cost, which demonstrates the practical nature of laser-scribed graphene-based materials. Finally, an outlook is presented regarding how laser scribing, a serial patterning method, may lead to similar developments in various other serial lithography techniques, such as ion beam lithography.